Evaluation of elastic modulus and hardness of thin films by nanoindentation

Jung, YG, Lawn, BR, Martyniuk, M, Huang, H and Hu, XZ (2004) Evaluation of elastic modulus and hardness of thin films by nanoindentation. Journal of Materials Research, 19 10: 3076-3080. doi:10.1557/JMR.2004.0380

Author Jung, YG
Lawn, BR
Martyniuk, M
Huang, H
Hu, XZ
Title Evaluation of elastic modulus and hardness of thin films by nanoindentation
Journal name Journal of Materials Research   Check publisher's open access policy
ISSN 0884-2914
Publication date 2004-01-01
Year available 2004
Sub-type Article (original research)
DOI 10.1557/JMR.2004.0380
Open Access Status Not yet assessed
Volume 19
Issue 10
Start page 3076
End page 3080
Total pages 5
Place of publication Warrendale
Publisher Materials Research Society
Language eng
Abstract Simple equations are proposed for determining elastic modulus and hardness properties of thin films on substrates from nanoindentation experiments. An empirical formulation relates the modulus E and hardness H of the film/substrate bilayer to corresponding material properties of the constituent materials via a power-law relation. Geometrical dependence of E and H is wholly contained in the power-law exponents, expressed here as sigmoidal functions of indenter penetration relative to film thickness. The formulation may be inverted to enable deconvolution of film properties from data on the film/substrate bilayers. Berkovich nanoindentation data for dense oxide and nitride films on silicon substrates are used to validate the equations and to demonstrate the film property deconvolution. Additional data for less dense nitride films are used to illustrate the extent to which film properties may depend on the method of fabrication.
Keyword Materials Science, Multidisciplinary
Wear-resistant Coatings
Q-Index Code C1
Institutional Status Non-UQ

Document type: Journal Article
Sub-type: Article (original research)
Collections: Excellence in Research Australia (ERA) - Collection
School of Mechanical & Mining Engineering Publications
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Citation counts: TR Web of Science Citation Count  Cited 135 times in Thomson Reuters Web of Science Article | Citations
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Created: Tue, 14 Aug 2007, 00:38:48 EST