Can ionic liquid additives be used to extend the scope of poly(styrene)-block-poly(methyl methacrylate) for directed self-assembly?

Bennett, Thomas M., Pei, Kevin, Cheng, Han-Hao, Thurecht, Kristofer J., Jack, Kevin S. and Blakey, Idriss (2014) Can ionic liquid additives be used to extend the scope of poly(styrene)-block-poly(methyl methacrylate) for directed self-assembly?. Journal of Micro/Nanolithography, MEMS and MOEMS, 13 3: 031304.1-031304.9. doi:10.1117/1.JMM.13.3.031304

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Author Bennett, Thomas M.
Pei, Kevin
Cheng, Han-Hao
Thurecht, Kristofer J.
Jack, Kevin S.
Blakey, Idriss
Title Can ionic liquid additives be used to extend the scope of poly(styrene)-block-poly(methyl methacrylate) for directed self-assembly?
Journal name Journal of Micro/Nanolithography, MEMS and MOEMS   Check publisher's open access policy
ISSN 1932-5150
1932-5134
Publication date 2014-01-01
Year available 2014
Sub-type Article (original research)
DOI 10.1117/1.JMM.13.3.031304
Open Access Status File (Publisher version)
Volume 13
Issue 3
Start page 031304.1
End page 031304.9
Total pages 9
Place of publication Bellingham, WA, United States
Publisher S P I E - International Society for Optical Engineering
Language eng
Subject 2208 Electrical and Electronic Engineering
2210 Mechanical Engineering
2504 Electronic, Optical and Magnetic Materials
3104 Condensed Matter Physics
3107 Atomic and Molecular Physics, and Optics
Abstract Directed self-assembly (DSA) is a promising approach for extending conventional lithographic techniques by being able to print features with critical dimensions under 10 nm. The most widely studied block copolymer system is polystyrene-block-poly(methyl methacrylate) (PS-b-PMMA). This system is well understood in terms of its synthesis, properties, and performance in DSA. However, PS-b-PMMA also has a number of limitations that impact on its performance and hence scope of application. The primary limitation is the low Flory-Huggins polymer-polymer interaction parameter (χ), which limits the size of features that can be printed. Another issue with block copolymers in general is that specific molecular weights need to be synthesized to achieve desired morphologies and feature sizes. Here we explore blending ionic liquid (IL) additives with PS-b-PMMA to increase the ÷ parameter. ILs have a number of useful properties that include negligible vapor pressure, tunable solvent strength, thermal stability, and chemical stability. The blends of PS-b-PMMA with an IL selective for the PMMA block allowed the resolution of the block copolymer to be improved. Depending on the amount of additive, it is also possible to tune the domain size and the morphology of the systems. These findings may expand the scope of PS-b-PMMA for DSA.
Keyword Block copolymer
Chi parameter
Flory-Huggins polymer-polymer interaction parameter
Ionic liquids
PS-b-PMMA
Q-Index Code C1
Q-Index Status Confirmed Code
Grant ID DP140103118
FT100100721
Institutional Status UQ

 
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Created: Thu, 28 Aug 2014, 21:51:22 EST by Shona Osborne on behalf of Centre for Advanced Imaging