Extending the scope of poly(styrene)-block-poly(methyl methacrylate) for directed self assembly

Bennett, Thomas, Pei, Kevin, Cheng, Han-Hao, Thurecht, Kristofe J., Jack, Kevin S. and Blakey, Idriss (2014). Extending the scope of poly(styrene)-block-poly(methyl methacrylate) for directed self assembly. In: Douglas J. Resnick and Christopher Bencher, Proceedings of SPIE: Alternative Lithographic Technologies VI. Alternative Lithographic Technologies VI, San Jose, United States, (). 24-27 February 2014. doi:10.1117/12.2046296

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Author Bennett, Thomas
Pei, Kevin
Cheng, Han-Hao
Thurecht, Kristofe J.
Jack, Kevin S.
Blakey, Idriss
Title of paper Extending the scope of poly(styrene)-block-poly(methyl methacrylate) for directed self assembly
Conference name Alternative Lithographic Technologies VI
Conference location San Jose, United States
Conference dates 24-27 February 2014
Proceedings title Proceedings of SPIE: Alternative Lithographic Technologies VI   Check publisher's open access policy
Journal name Proceedings of SPIE - The International Society for Optical Engineering   Check publisher's open access policy
Place of Publication Bellingham, WA, United States
Publisher SPIE
Publication Year 2014
Year available 2014
Sub-type Fully published paper
DOI 10.1117/12.2046296
Open Access Status File (Publisher version)
ISBN 9780819499721
ISSN 0277-786X
Editor Douglas J. Resnick
Christopher Bencher
Volume 9049
Total pages 12
Language eng
Abstract/Summary Directed self-assembly (DSA) is a promising technique for extending conventional lithographic techniques by being able to print features with critical dimensions under 10 nm. The most widely studied block copolymer system is polystyreneblock- polymethyl methacrylate (PS-b-PMMA). The system is well understood in terms of its synthesis, properties and performance in DSA. However, PS-b-PMMA also has a number of limitations that impact on its performance and hence scope of application. The primary limitation is the low Flory-Huggins polymer-polymer interaction parameter (Χ), which limits the size of features that can be printed by DSA. Another issue with block copolymers in general is that specific molecular weights need to be synthesized to achieve desired morphologies and feature sizes. We are exploring blending ionic liquid additiveswithPS-b-PMMAto increase the Χ parameter. This allows smaller feature sizes to be accessed by PS-b-PMMA. Depending on the amount of additive it is also possible to tune the domain size and the morphology of the systems. These findings may expand the scope of PS-b-PMMA for DSA.
Keyword Block copolymer
Chi parameter
Flory Huggins polymer-polymer interaction parameter
Ionic liquids
Q-Index Code E1
Q-Index Status Confirmed Code
Grant ID DP140103118
Institutional Status UQ

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