Multi-mode noise analysis of cantilevers for scanning probe microscopy

Salapaka, M. V., Bergh, H. S., Lai, J., Majumdar, A. and McFarland, E. (1997) Multi-mode noise analysis of cantilevers for scanning probe microscopy. Journal of Applied Physics, 81 6: 2480-2487. doi:10.1063/1.363955

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Author Salapaka, M. V.
Bergh, H. S.
Lai, J.
Majumdar, A.
McFarland, E.
Title Multi-mode noise analysis of cantilevers for scanning probe microscopy
Journal name Journal of Applied Physics   Check publisher's open access policy
ISSN 0021-8979
Publication date 1997-03-15
Year available 1978
Sub-type Article (original research)
DOI 10.1063/1.363955
Open Access Status File (Publisher version)
Volume 81
Issue 6
Start page 2480
End page 2487
Total pages 8
Place of publication Melville, NY, United States
Publisher A I P Publishing LLC
Language eng
Abstract A multi-mode analysis of micro-cantilever dynamics is presented. We derive the power spectral density of the cantilever displacement due to a thermal noise source and predict the cantilevers’s fundamental resonant frequency and higher harmonics. The first mode in the multi-mode model is equivalent to the traditional single-mode model. Experimental results obtained with a silicon nitride cantilever at 300 K are in excellent qualitative agreement with the multi-mode model. The multi-mode model may be used to obtain accurate values of the cantilever properties such as the elastic modulus,effective mass, thickness and moment of inertia.
Keyword Literature, African, Australian, Canadian
Q-Index Code C1
Q-Index Status Provisional Code
Institutional Status Unknown

Document type: Journal Article
Sub-type: Article (original research)
Collection: ResearcherID Downloads - Archived
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Citation counts: TR Web of Science Citation Count  Cited 107 times in Thomson Reuters Web of Science Article | Citations
Scopus Citation Count Cited 110 times in Scopus Article | Citations
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