Photon shield for atomic hydrogen plasma sources

Nienhaus, H, Gergen, B, Bergh, HS, Majumdar, A, Weinberg, WH and McFarland, EW (1999) Photon shield for atomic hydrogen plasma sources. Journal of Vacuum Science & Technology A-Vacuum Surfaces and Films, 17 2: 670-672. doi:10.1116/1.581635

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Author Nienhaus, H
Gergen, B
Bergh, HS
Majumdar, A
Weinberg, WH
McFarland, EW
Title Photon shield for atomic hydrogen plasma sources
Journal name Journal of Vacuum Science & Technology A-Vacuum Surfaces and Films   Check publisher's open access policy
ISSN 0734-2101
Publication date 1999-03-01
Year available 1999
Sub-type Article (original research)
DOI 10.1116/1.581635
Open Access Status File (Publisher version)
Volume 17
Issue 2
Start page 670
End page 672
Total pages 3
Place of publication Melville, NY, United States
Publisher A I P Publishing LLC
Language eng
Formatted abstract
Atomic hydrogen sources are usually strong photon emitters. To produce an atomic hydrogen beam and suppress the undesired photon flux, a small but effective light blocking device has been developed which fits into the quartz tube of a hydrogen plasma source. The device is made of stainless steel and uses angled passages and offset throughholes to absorb plasma generated photons while permitting hydrogen atoms and molecules to pass. The photon flux was reduced by a factor of at least 104, whereas an attenuation of the H atom flux was not observed. By measuring the average velocity of the H atoms passing through the light blocker it has been shown that this device in the microwaveplasma tube produces a room temperature thermalized atomic hydrogen beam.
Keyword Ultrahigh-Vacuum
Q-Index Code C1
Q-Index Status Provisional Code
Institutional Status Non-UQ

Document type: Journal Article
Sub-type: Article (original research)
Collection: School of Chemical Engineering Publications
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Citation counts: TR Web of Science Citation Count  Cited 9 times in Thomson Reuters Web of Science Article | Citations
Scopus Citation Count Cited 7 times in Scopus Article | Citations
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