Ultrathin Cu films on Si(111): Schottky barrier formation and sensor applications

Nienhaus, H, Bergh, HS, Gergen, B, Majumdar, A, Weinberg, WH and McFarland, EV (1999) Ultrathin Cu films on Si(111): Schottky barrier formation and sensor applications. Journal of Vacuum Science & Technology A-Vacuum Surfaces and Films, 17 4: 1683-1687. doi:10.1116/1.581872

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Author Nienhaus, H
Bergh, HS
Gergen, B
Majumdar, A
Weinberg, WH
McFarland, EV
Title Ultrathin Cu films on Si(111): Schottky barrier formation and sensor applications
Journal name Journal of Vacuum Science & Technology A-Vacuum Surfaces and Films   Check publisher's open access policy
ISSN 0734-2101
1944-2807
Publication date 1999-07-01
Year available 1999
Sub-type Article (original research)
DOI 10.1116/1.581872
Open Access Status File (Publisher version)
Volume 17
Issue 4
Start page 1683
End page 1687
Total pages 5
Place of publication Melville, NY, United States
Publisher A I P Publishing LLC
Language eng
Formatted abstract
Ultrathin Cufilms were evaporated on Si(111) surfaces at substrate temperatures of 175 K. By use of a microfabricated device structure, zero-force electrical contacts were formed on the thin Cu layers during evaporation. They allowed current/voltage measurements of diodes with Cufilms between 40 and 60 Å . Although the rectifier properties are improved with increasing thickness, the 60 Å diode still exhibits a large inhomogeneous interface with a low barrier height of 0.47 eV and an ideality factor of 2.1. Annealing the diode to room temperature leads to significant changes in the barrier height which increases to 0.65 eV and the ideality factor which decreases to unity, suggesting a modification of the interface. The annealed thin-metal diodes may be used as atomic hydrogen sensors. A chemicurrent is observed in the diode when exposed to H atoms. The current is based on a nonadiabatic electron–hole pair creation which occurs during exothermic adsorption of hydrogen on Cusurfaces.
Keyword Atomic-Hydrogen
Detector
Height
Diodes
Metal
Q-Index Code C1
Q-Index Status Provisional Code
Institutional Status Non-UQ

Document type: Journal Article
Sub-type: Article (original research)
Collection: School of Chemical Engineering Publications
 
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