Nanoscratch characteristics and interfacial adhesion energy of SiN/GaAs film/substrate bilayer systems

He, Anshun and Huang, Han (2013) Nanoscratch characteristics and interfacial adhesion energy of SiN/GaAs film/substrate bilayer systems. International Journal of Surface Science and Engineering, 7 4: 382-396. doi:10.1504/IJSURFSE.2013.057618

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Author He, Anshun
Huang, Han
Title Nanoscratch characteristics and interfacial adhesion energy of SiN/GaAs film/substrate bilayer systems
Journal name International Journal of Surface Science and Engineering   Check publisher's open access policy
ISSN 1749-785X
1749-7868
Publication date 2013-11-01
Sub-type Article (original research)
DOI 10.1504/IJSURFSE.2013.057618
Open Access Status Not Open Access
Volume 7
Issue 4
Start page 382
End page 396
Total pages 15
Place of publication Olney, Bucks, United Kingdom
Publisher Inderscience Publishers
Language eng
Formatted abstract
Deformation characteristics and interfacial adhesion property of silicon nitride/gallium arsenide film/substrate systems were investigated by use of nanoscratch. During scratching, three different types of deformation, elastic, elastoplastic and fracture, were discovered. The critical loads for film failure were obtained. The critical loads, together with the other scratch parameters, were used to determine the interfacial adhesion energies. The practical adhesion energies per unit area of the bilayers obtained were 2.72 and 3.73 Joules/m2, respectively. The tensile stress developed just behind the contact area and at the interface was attributed to the film failure. It was also found that residual compressive stress strengthened, but tensile stress weakened, the interfacial adhesion.
Keyword Thin film
Silicon nitride
Gallium arsenide
Interface adhesion
Nanoscratch
Q-Index Code C1
Q-Index Status Confirmed Code
Institutional Status UQ

Document type: Journal Article
Sub-type: Article (original research)
Collections: School of Mechanical & Mining Engineering Publications
Official 2014 Collection
 
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Created: Sat, 09 Nov 2013, 05:57:36 EST by Professor Han Huang on behalf of School of Mechanical and Mining Engineering