Nanostructural characteristics and mechanical properties of low temperature plasma enhanced chemical vapor deposited silicon nitride thin films

Huang, H, Dell, J. M. and Liu, S. (2009) Nanostructural characteristics and mechanical properties of low temperature plasma enhanced chemical vapor deposited silicon nitride thin films. Journal of Nanoscience and Nanotechnology, 9 6: 3734-3741. doi:10.1166/jnn.2009.NS59


Author Huang, H
Dell, J. M.
Liu, S.
Title Nanostructural characteristics and mechanical properties of low temperature plasma enhanced chemical vapor deposited silicon nitride thin films
Journal name Journal of Nanoscience and Nanotechnology   Check publisher's open access policy
ISSN 1533-4880
1533-4899
Publication date 2009-06-01
Sub-type Article (original research)
DOI 10.1166/jnn.2009.NS59
Open Access Status Not yet assessed
Volume 9
Issue 6
Start page 3734
End page 3741
Total pages 8
Place of publication Valencia, CA, United States
Publisher American Scientific Publishers
Language eng
Abstract This paper reports nanostructural characteristics and mechanical properties of the PECVD silicon nitride thin films deposited at relatively low temperatures. Nanostructures of the films were examined using high resolution transmission electron microscopy. Chemical bonding structures of the films were studied using Fourier Infrared Transmission Spectrum (FTIR) analysis. Mechanical properties of the films, such as creep behavior and frictional resistance, were investigated using nanoindentation and nanoscratch. The results showed that the variation in deposition temperature significantly affected the mechanical properties of the films, though all the films exhibited to have similar homogenous amorphous structures with no physical defect observed even at atomic scale. There existed strong correlations between the mechanical properties and the hydrogen concentration in the thin films.
Keyword Silicon nitride film
Mechanical property
Chemical bond
Nanostructure
Q-Index Code C1
Q-Index Status Provisional Code
Institutional Status UQ

Document type: Journal Article
Sub-type: Article (original research)
Collection: School of Engineering Publications
 
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Created: Thu, 03 Sep 2009, 18:11:34 EST by Mr Andrew Martlew on behalf of School of Engineering