Monitoring the electrical properties of the back silicon interface of silicon-on-sapphire wafers

Domyo, H., Bertling, K., Ho, T., Kistler, N., Imthurn G., Stuber, M., Rakic, A.D. and Yeow, Y. T. (2008) Monitoring the electrical properties of the back silicon interface of silicon-on-sapphire wafers. IEEE Electron Device Letters, 29 4: 325-327. doi:10.1109/LED.2008.918263


Author Domyo, H.
Bertling, K.
Ho, T.
Kistler, N.
Imthurn G.
Stuber, M.
Rakic, A.D.
Yeow, Y. T.
Title Monitoring the electrical properties of the back silicon interface of silicon-on-sapphire wafers
Journal name IEEE Electron Device Letters   Check publisher's open access policy
ISSN 0741-3106
Publication date 2008-04-01
Year available 2008
Sub-type Article (original research)
DOI 10.1109/LED.2008.918263
Open Access Status DOI
Volume 29
Issue 4
Start page 325
End page 327
Total pages 3
Editor J. R. Brews
Place of publication USA
Publisher IEEE
Language eng
Subject C1
090604 Microelectronics and Integrated Circuits
970109 Expanding Knowledge in Engineering
Abstract The density and the electrical nature of the interface traps at the silicon-sapphire interface of silicon-on-sapphire (SOS) MOSFETs have a significant influence on the electrical characteristics of these transistors. This letter describes a simple MOS test structure for evaluating the electrical properties of this interface of SOS wafers. Measurement and modeling of the C-V characteristics of the test structure fabricated on production SOS wafers are presented. We have demonstrated that the C-V characteristics are an efficient tool for studying the depletion of the silicon-sapphire interface by the interface trapped charge.
Keyword Engineering, Electrical & Electronic
Engineering
ENGINEERING, ELECTRICAL & ELECTRONIC
Q-Index Code C1
Q-Index Status Confirmed Code
Institutional Status UQ

Document type: Journal Article
Sub-type: Article (original research)
Collections: 2009 Higher Education Research Data Collection
School of Information Technology and Electrical Engineering Publications
 
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Created: Tue, 14 Apr 2009, 00:26:39 EST by Donna Clark on behalf of School of Information Technol and Elec Engineering