Origin of the low frequency type curve in silicon-on-sapphire MOS capacitors

Domyo, H., Bertling, K., Ho, T., Kistler, N., Imthurn, G., Stuber, M., Rakic, A. D. and Yeow, Y-T. (2008). Origin of the low frequency type curve in silicon-on-sapphire MOS capacitors. In: L. Faraone and M. Cortie, IEEE: Proceedings of the 2008 Conference on Optoelectronic and Microelectronic Materials and Devices. 2008 Conference on Optoelectronic and Microelectronic Materials and Devices (COMMAD 2008), Sydney, Australia, (129-131). 28th July - 1st August, 2008. doi:10.1109/COMMAD.2008.4802108


Author Domyo, H.
Bertling, K.
Ho, T.
Kistler, N.
Imthurn, G.
Stuber, M.
Rakic, A. D.
Yeow, Y-T.
Title of paper Origin of the low frequency type curve in silicon-on-sapphire MOS capacitors
Conference name 2008 Conference on Optoelectronic and Microelectronic Materials and Devices (COMMAD 2008)
Conference location Sydney, Australia
Conference dates 28th July - 1st August, 2008
Convener L. Faraone
Proceedings title IEEE: Proceedings of the 2008 Conference on Optoelectronic and Microelectronic Materials and Devices
Journal name Commad: 2008 Conference On Optoelectronic and Microelectronic Materials
Place of Publication Piscataway, NJ, USA
Publisher IEEE
Publication Year 2008
Year available 2008
Sub-type Fully published paper
DOI 10.1109/COMMAD.2008.4802108
Open Access Status
ISBN 978-1-4244-2717-8
Editor L. Faraone
M. Cortie
Start page 129
End page 131
Total pages 3
Language eng
Abstract/Summary MOS capacitor C-V measurement is a standard tool for investigating the electrical properties of a wafer. This paper investigates the use of a novel MOS capacitor structure for use with thin film silicon-on-sapphire wafers in order to determine backs surface silicon-sapphire interface quality.
Subjects E1
970109 Expanding Knowledge in Engineering
090604 Microelectronics and Integrated Circuits
Keyword Engineering, Electrical & Electronic
Nanoscience & Nanotechnology
Optics
Engineering
Science & Technology - Other Topics
Optics
Q-Index Code E1
Q-Index Status Confirmed Code
Institutional Status UQ

Document type: Conference Paper
Sub-type: Fully published paper
Collections: 2009 Higher Education Research Data Collection
School of Information Technology and Electrical Engineering Publications
 
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Created: Tue, 14 Apr 2009, 00:17:52 EST by Donna Clark on behalf of School of Information Technol and Elec Engineering