Brittle materials in nano-abrasive fabrication of optical mirror-surfaces

Yin, Ling and Huang, Han (2008) Brittle materials in nano-abrasive fabrication of optical mirror-surfaces. Precision Engineering, 32 4: 336-341. doi:10.1016/j.precisioneng.2007.09.001

Author Yin, Ling
Huang, Han
Title Brittle materials in nano-abrasive fabrication of optical mirror-surfaces
Journal name Precision Engineering   Check publisher's open access policy
ISSN 0141-6359
Publication date 2008-10-01
Year available 2008
Sub-type Article (original research)
DOI 10.1016/j.precisioneng.2007.09.001
Open Access Status Not yet assessed
Volume 32
Issue 4
Start page 336
End page 341
Total pages 5
Editor D. G. Chetwynd
J. C. Ziegert
T. Moriwaki
Place of publication New York, N.Y
Publisher Elsevier Science
Language eng
Subject C1
869999 Manufacturing not elsewhere classified
091006 Manufacturing Processes and Technologies (excl. Textiles)
Abstract The objective of this investigation was to evaluate the response of a wide range of brittle materials (polycrystalline silicon carbide, single-crystal 6H-SiC (0001) substrate, tungsten carbide composite, and amorphous glass-inlaid stabilized tetragonal polycrystalline zirconia) to nano-abrasive fabrication for optical mirrors. Ultra-precision grinding and polishing were employed to investigate the generation of surfaces, and white light interferometry was used for surface quality assessment. Results were examined with regard to the dependence of fabrication quality on material properties. We found that surface roughness in ultra-precision grinding increased with brittleness, following a simple exponential law, except for zirconia. The occurrence of a phase transformation in nano-fabrication of zirconia resulted in rough surfaces. (C) 2007 Elsevier Inc. All rights reserved.
Keyword Brittle materials
Optical mirror surface
Nanometer roughness
Q-Index Code C1
Q-Index Status Confirmed Code
Institutional Status UQ

Document type: Journal Article
Sub-type: Article (original research)
Collections: 2009 Higher Education Research Data Collection
School of Mechanical & Mining Engineering Publications
Version Filter Type
Citation counts: TR Web of Science Citation Count  Cited 24 times in Thomson Reuters Web of Science Article | Citations
Scopus Citation Count Cited 35 times in Scopus Article | Citations
Google Scholar Search Google Scholar
Created: Tue, 07 Apr 2009, 01:57:47 EST by Rose Clements on behalf of School of Mechanical and Mining Engineering