Surface modification for brittle monocrystalline materials by MeV ions

Chen, Y. H., Fang, F. Z., Xu, Z. W., Zhang, X. D. and Hu, X. T. (2012). Surface modification for brittle monocrystalline materials by MeV ions. In: Proceedings of the 17th International Conference on Ion Beam Modification of Materials (IBMM 2010). 17th International Conference on Ion Beam Modification of Materials, Québec, Canada, (433-436). 22–27 August 2010. doi:10.1016/j.nimb.2011.01.117


Author Chen, Y. H.
Fang, F. Z.
Xu, Z. W.
Zhang, X. D.
Hu, X. T.
Title of paper Surface modification for brittle monocrystalline materials by MeV ions
Conference name 17th International Conference on Ion Beam Modification of Materials
Conference location Québec, Canada
Conference dates 22–27 August 2010
Proceedings title Proceedings of the 17th International Conference on Ion Beam Modification of Materials (IBMM 2010)   Check publisher's open access policy
Place of Publication Amsterdam, Netherlands
Publisher Elsevier
Publication Year 2012
Sub-type Fully published paper
DOI 10.1016/j.nimb.2011.01.117
Open Access Status Not yet assessed
ISSN 0168-583X
1872-9584
Volume 272
Start page 433
End page 436
Total pages 4
Language eng
Formatted Abstract/Summary
A novel method of MeV ion implantation surface modification for improving the mechanical properties of brittle monocrystalline materials is proposed. The mechanical properties of the surface layer of the material are modified in a depth up to a few micrometers by decrystallization using low influences and high energy ion bombardments. Implantations are carried out on monocrystalline silicon using a van de Graaff accelerator with 10 MeV F ion and a fluence of 1 × 1014 ions cm−2. Focused Ion Beam (FIB) equipped with an in situ rotational nanomotor is used to make cross-sectional Transmission Electron Microscopy (TEM) samples for the modified layer. Large penetration depth nano-indentation is carried out and surface topography after indentation is observed by Scanning Electron Microscopy (SEM). TEM and electron diffraction analysis show the existence of the amorphous phase, nano-indentation results reveal the reduction of the brittleness, hardness and elastic modulus of the implanted surface. Therefore, the method is beneficial for the nano-manufacturing process for enhancing the plasticity of the brittle monocrystalline materials and introducing little defects for the low fluences.
Keyword Surface modification
Ion implantation
Brittle materials
Q-Index Code E1
Q-Index Status Provisional Code
Institutional Status Non-UQ

Document type: Conference Paper
Collection: School of Mechanical & Mining Engineering Publications
 
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Created: Wed, 15 Mar 2017, 16:15:58 EST by Yunhui Chen on behalf of School of Mechanical and Mining Engineering