Experimental investigation of resonant MEMS switch with ac actuation

Pal, Jitendra, Zhu, Yong, Wang, Boyi, Lu, Junwei, Khan, Fahimullah, Dao, Dzung Viet and Wang, Yifan (2016) Experimental investigation of resonant MEMS switch with ac actuation. Applied Physics Letters, 108 25: . doi:10.1063/1.4954262

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Author Pal, Jitendra
Zhu, Yong
Wang, Boyi
Lu, Junwei
Khan, Fahimullah
Dao, Dzung Viet
Wang, Yifan
Title Experimental investigation of resonant MEMS switch with ac actuation
Journal name Applied Physics Letters   Check publisher's open access policy
ISSN 0003-6951
Publication date 2016-06-20
Year available 2016
Sub-type Article (original research)
DOI 10.1063/1.4954262
Open Access Status File (Publisher version)
Volume 108
Issue 25
Total pages 4
Place of publication Melville, NY, United States
Publisher American Institute of Physics Inc.
Collection year 2017
Language eng
Abstract In this letter, modeling, analysis, and experimental investigation for a resonant MEMS switch are presented. The resonant switch harnesses its mechanical resonance to lower the required actuation voltage by a substantial factor over the switch with static actuation. With alternating actuation voltage at its mechanical resonance frequency of 6.6 kHz, the average capacitance is tuned by changing the gap between fixed and movable electrodes. Based on the proposed actuation method, the device offers 57.44% lower actuation voltage compared with the switch with static actuation.
Keyword Resonant MEMS switch
Radio frequency (RF)
Static actuation
Actuation voltage
Q-Index Code C1
Q-Index Status Provisional Code
Institutional Status UQ

Document type: Journal Article
Sub-type: Article (original research)
Collections: HERDC Pre-Audit
School of Information Technology and Electrical Engineering Publications
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