Interfacial adhesion of film/substrate system characterised by nanoindentation

Lu, Mingyuan and Huang, Han (2015). Interfacial adhesion of film/substrate system characterised by nanoindentation. In Sam Zhang. (Ed.), Thin Films and Coatings: Toughening and Toughness Characterization (pp. 315-375) Hoboken, NJ United States: CRC Press.

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Name Description MIMEType Size Downloads
Author Lu, Mingyuan
Huang, Han
Title of chapter Interfacial adhesion of film/substrate system characterised by nanoindentation
Title of book Thin Films and Coatings: Toughening and Toughness Characterization
Place of Publication Hoboken, NJ United States
Publisher CRC Press
Publication Year 2015
Sub-type Chapter in reference work, encyclopaedia, manual or handbook
Series Advances in Materials Science and Engineering
ISBN 9781482222906
9781482222913
1482222914
Editor Sam Zhang.
Chapter number 6
Start page 315
End page 375
Total pages 61
Total chapters 9
Collection year 2016
Language eng
Abstract/Summary Thin films are extensively used in microelectromechanical system (MEMS) devices. The interfacial adhesion of thin films is an important property if the devices are to operate reliably. The chapter provides an original and critical review and presentation of the highly heterogeneous field of interfacial adhesion studies. Moreover, the chapter provides a new analytical framework for drawing together, interpreting and analysing the quite disparate and multidisciplinary research on interfacial toughness measurements, including the results generated by the authors that are not published elsewhere. This book chapter certainly advances the knowledge of interfacial adhesion mechanism of thin films and its study. Indeed, the purpose of the entire book is not simply an overview of a heretofore disparate field of interfacial toughness research works, but to provide a new way of thinking about and researching the interfacial properties of thin films and coatings, which is a landmark in the advanced materials science and engineering.
Q-Index Code B1
Q-Index Status Confirmed Code
Institutional Status UQ

 
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Created: Fri, 11 Sep 2015, 13:16:16 EST by Professor Han Huang on behalf of School of Mechanical and Mining Engineering