A catalytic alloy approach for graphene on epitaxial SiC on silicon wafers

Iacopi, Francesca, Mishra, Neeraj, Cunning, Benjamin Vaughan, Goding, Dayle, Dimitrijev, Sima, Brock, Ryan, Dauskardt, Reinhold H, Wood, Barry and Boeckl J. (2015) A catalytic alloy approach for graphene on epitaxial SiC on silicon wafers. Journal of Materials Research, 30 5: 609-616. doi:10.1557/jmr.2015.3

Author Iacopi, Francesca
Mishra, Neeraj
Cunning, Benjamin Vaughan
Goding, Dayle
Dimitrijev, Sima
Brock, Ryan
Dauskardt, Reinhold H
Wood, Barry
Boeckl J.
Title A catalytic alloy approach for graphene on epitaxial SiC on silicon wafers
Journal name Journal of Materials Research   Check publisher's open access policy
ISSN 2044-5326
Publication date 2015-03-14
Year available 2015
Sub-type Article (original research)
DOI 10.1557/jmr.2015.3
Open Access Status
Volume 30
Issue 5
Start page 609
End page 616
Total pages 8
Place of publication New York, United States
Publisher Cambridge University Press
Collection year 2016
Language eng
Formatted abstract
We introduce a novel approach to the synthesis of high-quality and highly uniform few-layer graphene on silicon wafers, based on solid source growth from epitaxial 3C-SiC films. Using a Ni/Cu catalytic alloy, we obtain a transfer-free bilayer graphene directly on Si(100) wafers, at temperatures potentially compatible with conventional semiconductor processing. The graphene covers uniformly a 2″ silicon wafer, with a Raman ID/IG band ratio as low as 0.5, indicative of a low defectivity material. The sheet resistance of the graphene is as low as 25 Ω/square, and its adhesion energy to the underlying substrate is substantially higher than transferred graphene. This work opens the avenue for the true wafer-level fabrication of microdevices comprising graphene functional layers. Specifically, we suggest that exceptional conduction qualifies this graphene as a metal replacement for MEMS and advanced on-chip interconnects with ultimate scalability.
Q-Index Code C1
Q-Index Status Confirmed Code
Institutional Status UQ

Document type: Journal Article
Sub-type: Article (original research)
Collections: Official 2016 Collection
Centre for Microscopy and Microanalysis Publications
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Citation counts: TR Web of Science Citation Count  Cited 9 times in Thomson Reuters Web of Science Article | Citations
Scopus Citation Count Cited 11 times in Scopus Article | Citations
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