Resonance frequency response of geometrically nonlinear micro-switches under electrical actuation

Jia, X. L., Yang, J., Kitipornchai, S. and Lim, C. W. (2012) Resonance frequency response of geometrically nonlinear micro-switches under electrical actuation. Journal of Sound and Vibration, 331 14: 3397-3411. doi:10.1016/j.jsv.2012.02.026


Author Jia, X. L.
Yang, J.
Kitipornchai, S.
Lim, C. W.
Title Resonance frequency response of geometrically nonlinear micro-switches under electrical actuation
Journal name Journal of Sound and Vibration   Check publisher's open access policy
ISSN 0022-460X
1095-8568
Publication date 2012-07-02
Year available 2012
Sub-type Article (original research)
DOI 10.1016/j.jsv.2012.02.026
Open Access Status
Volume 331
Issue 14
Start page 3397
End page 3411
Total pages 15
Place of publication Camden, London, United Kingdom
Publisher Elsevier Ltd
Collection year 2012
Language eng
Abstract This paper presents an analytical study on the forced vibration of electrically actuated micro-switches near resonance region, taking into consideration the intermolecular force, axial residual stress, and geometrical nonlinearity due to mid-plane stretching. The micro-switch is made of either homogeneous material or non-homogeneous functionally graded materials with two material phases and subjected to a time-varying applied voltage consisting of a DC component and a small AC component. The perturbation-based method of averaging is employed to solve the nonlinear partial differential governing equations to obtain the resonance frequency responses of both the vibration amplitude and phase angle. The present analysis is validated through direct comparisons with published experimental results and excellent agreement has been achieved. A parametric study is conducted to show the effects of geometrical nonlinearity, intermolecular Casimir force, the electrostatic force due to DC voltage, the AC voltage induced harmonic force, quality factor, axial residual stress and material composition on the frequency response characteristics.
Q-Index Code C1
Q-Index Status Provisional Code
Institutional Status Non-UQ

Document type: Journal Article
Sub-type: Article (original research)
Collection: School of Civil Engineering Publications
 
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Created: Wed, 29 Oct 2014, 11:36:30 EST by Jeannette Watson on behalf of School of Civil Engineering