Variable frequency microwave curing of SU8 photoresist films

Antonio, Christian and Watanachai, Piyachat (2014) Variable frequency microwave curing of SU8 photoresist films. Advanced Materials Research, 931-932 101-105. doi:10.4028/

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Author Antonio, Christian
Watanachai, Piyachat
Title Variable frequency microwave curing of SU8 photoresist films
Journal name Advanced Materials Research   Check publisher's open access policy
ISSN 1022-6680
ISBN 9783038350903
Publication date 2014
Year available 2014
Sub-type Article (original research)
DOI 10.4028/
Open Access Status
Volume 931-932
Start page 101
End page 105
Total pages 5
Place of publication Pfaffikon, Switzerland
Publisher Scientific.Net
Collection year 2015
Language eng
Formatted abstract
Photoresist used in the fabrication of Microelectrochemical Systems (MEMS) has traditionally been processed using conventional curing technology. This type of curing is often time intensive and results in non-uniform products. A uniform bake of the layer is not always possible due to the mechanisms of heat transfer conventional curing offers, leading to poor pattern resolution, formation of micro-cracks and severe outgassing occurring as a consequence. The Variable Frequency Microwave (VFM) Technique was successfully utilised in this study as an alternative method for the processing of negative tone SU8 photoresist. The VFM method was compared to the conventional processing method, which utilises a Hotplate, and a hybrid method utilizing both Hotplate and the VFM and found that an increase on the degree of cure was observed using the VFM at similar processing temperatures which means that SU8 curing at lower temperatures or rapid curing is possible. The increase in cure rates can be attributed to a combination of heat transfer and the unique capability of microwave to couple with the sample. Optical studies of the microstructures fabricated suggest that films that have a degree of cure of <60% resulted in poor quality microstructures. The VFM was found to achieve satisfactory microstructures at most of the temperatures tested as compared to the other two methods tested.
Q-Index Code C1
Q-Index Status Confirmed Code
Institutional Status Non-UQ

Document type: Journal Article
Sub-type: Article (original research)
Collections: Julius Kruttschnitt Mineral Research Centre Publications
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Created: Mon, 11 Aug 2014, 10:15:30 EST by Karen Holtham on behalf of Julius Kruttschnitt Mineral Research Centre