Preparation of a stable silica membrane by a counter diffusion chemical vapor deposition method

Nomura, Mikihiro, Ono, Kenta, Gopalakrishnan, Suraj, Sugawara, Takashi and Nakao, Shin-Ichi (2005) Preparation of a stable silica membrane by a counter diffusion chemical vapor deposition method. Journal of Membrane Science, 251 1-2: 151-158. doi:10.1016/j.memsci.2004.11.008


Author Nomura, Mikihiro
Ono, Kenta
Gopalakrishnan, Suraj
Sugawara, Takashi
Nakao, Shin-Ichi
Title Preparation of a stable silica membrane by a counter diffusion chemical vapor deposition method
Journal name Journal of Membrane Science   Check publisher's open access policy
ISSN 0376-7388
Publication date 2005-04
Sub-type Article (original research)
DOI 10.1016/j.memsci.2004.11.008
Volume 251
Issue 1-2
Start page 151
End page 158
Total pages 8
Place of publication Amsterdam, The Netherlands
Publisher Elsevier
Language eng
Subject 04 Earth Sciences
09 Engineering
05 Environmental Sciences
Formatted abstract
A stable silica membrane having excellent H2/N2 permeance ratio (over 1000) was prepared by the counter diffusion chemical vapor deposition method using tetramethyl orthosilicate (TMOS) and O2 as reactants at 873 K. TMOS and O2 were provided in the opposing geometry of the substrates, and silica layer was deposited in the substrate pores. Apparent activation energies through the silica membranes increased with increasing deposition temperatures. The activation energy of H2 was ca. 20 kJ mol−1 through the membrane. H2 permeance at 873 K permeation test was 1.5 ×10−7 mol m−2 s−1 Pa−1. H2/N2 permeance ratio was kept for 21 h under the typical steam-reforming conditions of methane for a membrane reactor (76 kPa of steam at 773 K).
Keyword Hydrogen
Silica membrane
Counter diffusion CVD
Steam stability
Tetramethyl orthosilicate
Q-Index Code C1
Q-Index Status Provisional Code
Institutional Status Unknown

Document type: Journal Article
Sub-type: Article (original research)
Collections: Excellence in Research Australia (ERA) - Collection
School of Chemical Engineering Publications
 
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Created: Wed, 03 May 2006, 23:46:12 EST