Synthesis of amorphous silicon carbide nanoparticles in a low temperature low pressure plasma reactor

Lin, Hongfei, Gerbec, Jeffrey A., Sushchikh, Michael and McFarland, Eric W. (2008) Synthesis of amorphous silicon carbide nanoparticles in a low temperature low pressure plasma reactor. Nanotechnology, 19 32: 325601.1-325601.8. doi:10.1088/0957-4484/19/32/325601


Author Lin, Hongfei
Gerbec, Jeffrey A.
Sushchikh, Michael
McFarland, Eric W.
Title Synthesis of amorphous silicon carbide nanoparticles in a low temperature low pressure plasma reactor
Journal name Nanotechnology   Check publisher's open access policy
ISSN 0957-4484
1361-6528
Publication date 2008-08-13
Sub-type Article (original research)
DOI 10.1088/0957-4484/19/32/325601
Open Access Status
Volume 19
Issue 32
Start page 325601.1
End page 325601.8
Total pages 8
Place of publication Bristol, United Kingdom
Publisher Institute of Physics Publishing
Language eng
Abstract Commercial scale production of silicon carbide (SiC) nanoparticles smaller than 10 nm remains a significant challenge. In this paper, a microwave plasma reactor and appropriate reaction conditions have been developed for the synthesis of amorphous SiC nanoparticles. This continuous gas phase process is amenable to large scale production use and utilizes the decomposition of tetramethylsilane (TMS) for both the silicon and the carbon source. The influence of synthesis parameters on the product characteristics was investigated. The as-prepared SiC particles with sizes between 4 and 6 nm were obtained from the TMS precursor in a plasma operated at low temperature and low precursor partial pressure (0.001-0.02 Torr) using argon as the carrier gas (3 Torr). The carbon:silicon ratio was tuned by the addition of hydrogen and characterized by x-ray photoelectron spectroscopy. The reaction mechanism of SiC nanoparticle formation in the microwave plasma was investigated by mass spectroscopy of the gaseous products.
Q-Index Code C1
Q-Index Status Provisional Code
Institutional Status Non-UQ

Document type: Journal Article
Sub-type: Article (original research)
Collection: School of Chemical Engineering Publications
 
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