A MIS device structure for detection of chemically induced charge carriers

Liu, X., Cuenya, B. R. and McFarland, E. W. (2004) A MIS device structure for detection of chemically induced charge carriers. Sensors and Actuators, B: Chemical, 99 2-3: 556-561. doi:10.1016/j.snb.2004.01.014

Author Liu, X.
Cuenya, B. R.
McFarland, E. W.
Title A MIS device structure for detection of chemically induced charge carriers
Journal name Sensors and Actuators, B: Chemical   Check publisher's open access policy
ISSN 0925-4005
Publication date 2004-05-01
Sub-type Article (original research)
DOI 10.1016/j.snb.2004.01.014
Open Access Status Not yet assessed
Volume 99
Issue 2-3
Start page 556
End page 561
Total pages 6
Place of publication Amsterdam, Netherlands
Publisher Elsevier BV
Language eng
Formatted abstract
Chemically induced electronic excitations were detected from adsorption of molecular ethylene and atomic oxygen on large-area Au/Al2O3/n-Si metal/insulator/semiconductor (MIS) diodes. The devices were fabricated with oxide thicknesses varying between 0 and 8nm. For devices with an oxide layer less than ∼3nm and relatively energetic surface adsorption reactions, electrons are excited by non-adiabatic energy transfer above the Fermi level and travel ballistically into the semiconductor. For low energy reactions and thicker oxides, charge transport in the device is dominated by ballistic "hot" holes created below the Fermi level which travel to the metal-insulator junction to electron donor states resulting in an effective forward-bias charging current. The energy-band structure of silicon as well as the density of interfacial states of the metal-insulator junctions strongly influences the electronic characteristics of the device. These MIS devices are suitable as molecular sensors for the detection of chemical species with low adsorption energies, such as hydrocarbons.
Keyword Al 2O3
Chemical sensor
Hot electron transport
Schottky diode
Q-Index Code C1
Q-Index Status Provisional Code
Institutional Status Non-UQ

Document type: Journal Article
Sub-type: Article (original research)
Collection: School of Chemical Engineering Publications
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Citation counts: TR Web of Science Citation Count  Cited 9 times in Thomson Reuters Web of Science Article | Citations
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