Characterization of the interfacial strength of SiNx/GaAs film/substrate systems using energy balance in nanoindentation

Xie, Hongtao and Huang, Han (2013) Characterization of the interfacial strength of SiNx/GaAs film/substrate systems using energy balance in nanoindentation. Journal of Materials Research, 28 22: 3137-3145. doi:10.1557/jmr.2013.317


Author Xie, Hongtao
Huang, Han
Title Characterization of the interfacial strength of SiNx/GaAs film/substrate systems using energy balance in nanoindentation
Journal name Journal of Materials Research   Check publisher's open access policy
ISSN 0884-2914
2044-5326
Publication date 2013-11-11
Sub-type Article (original research)
DOI 10.1557/jmr.2013.317
Volume 28
Issue 22
Start page 3137
End page 3145
Total pages 9
Place of publication New York, NY, United States
Publisher Cambridge University Press
Collection year 2014
Language eng
Abstract The linear elastic recovery measured from the nanoindentation unloading curve of a film/substrate system was used to determine the practical work for delamination using the proposed energy balance method and to estimate the delaminated area using the Hertz contact loaded model. The practical work for delamination was then calculated by dividing the external mechanical work required for generating interfacial crack by the delaminated area. The finite element model simulation demonstrated that the energy method was feasible and the estimation of delamination area using the Hertz model was accurate. The practical works for delamination in the plasma-enhanced chemical vapor deposition SiNx/GaAs film/substrate systems estimated using this method were in the range of 1–2.3 J/m2, which were in reasonably good agreement with those obtained from our another experimental approach.
Q-Index Code C1
Q-Index Status Confirmed Code
Institutional Status UQ

Document type: Journal Article
Sub-type: Article (original research)
Collections: School of Mechanical & Mining Engineering Publications
Official 2014 Collection
 
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Citation counts: TR Web of Science Citation Count  Cited 3 times in Thomson Reuters Web of Science Article | Citations
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Created: Wed, 20 Nov 2013, 15:23:05 EST by Professor Han Huang on behalf of School of Mechanical and Mining Engineering