A resonant method for determining residual stress and elastic modulus of a thin film

Ma, Shujun, Wang, Shiliang, Iacopi, Francesca and Huang, Han (2013) A resonant method for determining residual stress and elastic modulus of a thin film. Applied Physics Letters, 103 3: 031603.1-031603.5. doi:10.1063/1.4813843

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Author Ma, Shujun
Wang, Shiliang
Iacopi, Francesca
Huang, Han
Title A resonant method for determining residual stress and elastic modulus of a thin film
Journal name Applied Physics Letters   Check publisher's open access policy
ISSN 0003-6951
1077-3118
Publication date 2013-07
Year available 2013
Sub-type Article (original research)
DOI 10.1063/1.4813843
Open Access Status File (Author Post-print)
Volume 103
Issue 3
Start page 031603.1
End page 031603.5
Total pages 5
Place of publication College Park, MD, United States
Publisher American Institute of Physics
Collection year 2014
Language eng
Abstract By measuring the resonant frequencies of the first two symmetric vibration modes of a circular thin-film diaphragm and solving the Rayleigh-Ritz equation analytically, the residual stress and elastic modulus of the film were determined simultaneously. The results obtained employing this method are in excellent agreement with those obtained numerically in finite element modelling when tested using freestanding circular SiC diaphragms with residual tensile stress. The stress and modulus values are also in reasonably good agreement with those obtained from nanoindentation and wafer curvature measurements, respectively.
Q-Index Code C1
Q-Index Status Confirmed Code
Institutional Status UQ
Additional Notes Article number 031603

Document type: Journal Article
Sub-type: Article (original research)
Collections: School of Mechanical & Mining Engineering Publications
Official 2014 Collection
 
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Created: Thu, 18 Jul 2013, 11:51:15 EST by Professor Han Huang on behalf of School of Mechanical and Mining Engineering