A focused review on nanoscratching-induced deformation of monocrystalline silicon

Wu, Yueqin, Huang, Han and Zou, Jin (2013) A focused review on nanoscratching-induced deformation of monocrystalline silicon. International Journal of Surface Science and Engineering, 7 1: 51-80. doi:10.1504/IJSURFSE.2013.051918

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Author Wu, Yueqin
Huang, Han
Zou, Jin
Title A focused review on nanoscratching-induced deformation of monocrystalline silicon
Journal name International Journal of Surface Science and Engineering   Check publisher's open access policy
ISSN 1749-7868
1749-785X
Publication date 2013-01
Sub-type Critical review of research, literature review, critical commentary
DOI 10.1504/IJSURFSE.2013.051918
Volume 7
Issue 1
Start page 51
End page 80
Total pages 30
Place of publication Bucks, Switzerland
Publisher Inderscience Publishers
Collection year 2014
Language eng
Abstract This focused review includes two parts. In the first part, the previous studies on the deformations of monocrystalline Si induced by nanoscratching were summarised. In the second part, our recent studies on the scratching-induced deformation of Si were systematically presented. The studies have demonstrated that lateral force in nanoscratching plays a key role in the amorphization and phase transformation of Si under mechanical loading. The deformation route of Si appears to be different from those reported from the nanoindentation studies.
Keyword Nanoscratching
Deformation
Monocrystalline silicon
Transmission electron microscopy
Phase transformation
Amporphisation
Q-Index Code C1
Q-Index Status Confirmed Code
Institutional Status UQ

Document type: Journal Article
Sub-type: Critical review of research, literature review, critical commentary
Collections: School of Mechanical & Mining Engineering Publications
Official 2014 Collection
Centre for Microscopy and Microanalysis Publications
 
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Created: Fri, 25 Jan 2013, 07:39:16 EST by Professor Han Huang on behalf of School of Mechanical and Mining Engineering