A simple resonant method that can simultaneously measure elastic modulus and density of thin films

Ma, Shujun, Huang, Han, Lu, Mingyuan and Veidt, Martin (2012) A simple resonant method that can simultaneously measure elastic modulus and density of thin films. Surface and Coatings Technology, 209 : 208-211.


Author Ma, Shujun
Huang, Han
Lu, Mingyuan
Veidt, Martin
Title A simple resonant method that can simultaneously measure elastic modulus and density of thin films
Journal name Surface and Coatings Technology   Check publisher's open access policy
ISSN 0257-8972
Publication date 2012-09-25
Sub-type Article (original research)
DOI 10.1016/j.surfcoat.2012.08.072
Volume 209
Start page 208
End page 211
Total pages 4
Place of publication Lausanne, Switzerland
Publisher Elsevier
Collection year 2013
Language eng
Abstract By measuring the resonant frequencies of cantilever beams without and with thinfilms deposited and with the use of the Euler–Bernoulli beam theory, elasticmodulus and density of thinfilms can be determined simultaneously. This simpleresonantmethod was validated using a sputtered Ni film/Si substrate system. The elasticmodulus of the Ni film obtained from this method was in excellent agreement with that measured by use of nanoindentation.
Keyword Thinfilm
Density
Elasticmodulus
Resonant frequency
Q-Index Code C1
Q-Index Status Confirmed Code
Institutional Status UQ

Document type: Journal Article
Sub-type: Article (original research)
Collections: School of Mechanical & Mining Engineering Publications
Official 2013 Collection
 
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Created: Mon, 01 Oct 2012, 19:54:26 EST by Professor Han Huang on behalf of School of Mechanical and Mining Engineering