铬过渡层位置及金属沉积角度对纳米球刻蚀法制备二维银纳米点阵结构的影响

Kong, Ling-Qi, Zhang, Chun-Jing, Huang, Sheng-Li and Zhu, Xian-Fang (2012) 铬过渡层位置及金属沉积角度对纳米球刻蚀法制备二维银纳米点阵结构的影响. Acta Physica Sinica, 61 3: 036102-1-036102-8.

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Author Kong, Ling-Qi
Zhang, Chun-Jing
Huang, Sheng-Li
Zhu, Xian-Fang
Title 铬过渡层位置及金属沉积角度对纳米球刻蚀法制备二维银纳米点阵结构的影响
Translated title Effect of Cr position and metal deposition direction on two-dimensional Ag nanoparticle array structure during nanosphere lithography
Language of Title chi
Journal name Acta Physica Sinica   Check publisher's open access policy
Language of Journal Name eng
ISSN 1000-3290
Publication date 2012-02
Sub-type Article (original research)
Volume 61
Issue 3
Start page 036102-1
End page 036102-8
Total pages 8
Place of publication Beijing, China
Publisher Zhongguo Wuli Xuehui
Collection year 2013
Language chi
Abstract Ag nanoparticles with two-dimensional (2D) array structure are fabricated via nanosphere lithography. The influences of Cr interlayer position and metal deposition direction on array structure are systematically studied. It is found that the structure of the 2D Ag nanoparticle array with Cr interlayer is better than that without interlayers. When the Cr interlayer is deposited on the PS mask, the tips of the acquired triangle nanoparticles are much sharper, and the area of the nanoparticle array is much larger than that in the other case. Moreover, the achieved nanoparticle array has a better uniformity and compactness in structure, and a higher binding ability to the substrate when Cr and Ag deposition direction are perpendicular to the surface of the substrate. Further absorption spectrum experiment proves the improvement of the structure and feature of the 2D Ag nanoparticle array. All these results are very crucial to the future modification and fabrication of biochemical sensors with the 2D Ag nanoparticle array.
Keyword Nanosphere lithography
Cr interlayer
Deposition direction
Absorption spectrum
Q-Index Code C1
Q-Index Status Confirmed Code
Institutional Status UQ

Document type: Journal Article
Sub-type: Article (original research)
Collections: School of Mechanical & Mining Engineering Publications
Official 2013 Collection
 
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