Surface alloying of Al ion implantation into Fe target at elevated temperature

Chen, T. and Chang, H. W. (2005) Surface alloying of Al ion implantation into Fe target at elevated temperature. Acta Metallurgica Sinica (English Letters), 41 4: 417-420.

Author Chen, T.
Chang, H. W.
Title Surface alloying of Al ion implantation into Fe target at elevated temperature
Journal name Acta Metallurgica Sinica (English Letters)   Check publisher's open access policy
ISSN 1006-7191
Publication date 2005-04
Sub-type Article (original research)
Volume 41
Issue 4
Start page 417
End page 420
Total pages 4
Place of publication Liaoning, China
Publisher Zhongguo Kexueyuan Jinshu Yanjiusuo
Language eng
Formatted abstract
Surface alloying of Al ion implantation into Fe target with an ion energy of 120 keV has been investigated at the implantation temperatures of 250 and 500°C. The Al concentration-depth profiles and structure changes on the implanted Fe surface were determined by Rutherford backscattering spectroscopy (RBS) and X-ray diffraction (XRD), respectively. It is shown that at a dose of 1 × 1017 ions cm-2, the Al ion implantation depths are 180 and 200 nm at the substrate temperatures of 250 and 500°C, respectively, while both the Al peak concentrations are 10% (atomic fraction). The intermetallic Al13Fe4 was formed at the temperatures of 250 and 500°C, the oxide AlFeO3 phase was also detected due to the contaminant oxygen. The model of effective heat formation was successfully adopted to interpret the intermetallics formation during Al ion implantation into Fe target at elevated temperature. The calculation results of concentration-depth profiles by using the mass transfer model are consistent with the experimental results.
Q-Index Code C1
Q-Index Status Provisional Code
Institutional Status Non-UQ

Document type: Journal Article
Sub-type: Article (original research)
Collections: School of Mechanical & Mining Engineering Publications
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Created: Thu, 20 Oct 2011, 10:50:18 EST by Jeffrey Chang on behalf of School of Mechanical and Mining Engineering