Thermal stability of Er2O3 thin films grown epitaxially on Si substrates

Chen, Sheng, Zhu, Yanyan, Wu, Rong, Wu, Yueqin, Fan, Yongliang and Jiang, Zuimin (2007) Thermal stability of Er2O3 thin films grown epitaxially on Si substrates. Journal of Applied Physics, 101 6: 064106-1-064106-3. doi:10.1063/1.2712144

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Author Chen, Sheng
Zhu, Yanyan
Wu, Rong
Wu, Yueqin
Fan, Yongliang
Jiang, Zuimin
Title Thermal stability of Er2O3 thin films grown epitaxially on Si substrates
Formatted title
Thermal stability of Er2O3 thin films grown epitaxially on Si substrates
Journal name Journal of Applied Physics   Check publisher's open access policy
ISSN 0021-8979
1089-7550
Publication date 2007-03-15
Sub-type Article (original research)
DOI 10.1063/1.2712144
Open Access Status File (Publisher version)
Volume 101
Issue 6
Start page 064106-1
End page 064106-3
Total pages 3
Place of publication College Park, MD, United States
Publisher American Institute of Physics
Language eng
Formatted abstract
The thermal stability of Er2O3 thin films grown epitaxially on Si substrates has been investigated in this paper by x-ray diffraction and high resolution transmission electron microscopy. The Er2O3/Si(001) films are found to react with Si to form silicates at the temperature of 450 °C in N2 ambience, whereas O2 ambience can prevent the silicate formation even at the temperature of 600 °C. However, at a high temperature of 900 °C in either N2 or O2 ambience, Er2O3 films react with Si, and both silicate and SiO2 are formed in the films. In addition, the Er2O3 films grown on Si(111) substrates show poorer thermal stability than those grown on Si(001) substrates; Er silicide is formed at the interface in the films annealed at 450 °C in O2 ambience, which is attributed to that the reaction product hexagonal ErSi2 is formed more easily on Si(111) than on Si(001) due to structure similarity as well as small lattice mismatch.
Q-Index Code C1
Q-Index Status Provisional Code
Institutional Status Non-UQ
Additional Notes Article # 064106

Document type: Journal Article
Sub-type: Article (original research)
Collection: Faculty of Engineering, Architecture and Information Technology Publications
 
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Created: Tue, 04 Oct 2011, 09:57:07 EST by Viviane Victoria Crosthwaite on behalf of Faculty Of Engineering, Architecture & Info Tech