A Comparison of Plasma Immersion Ion-Implantation with Conventional Ion-Implantation

Kenny, MJ, Wielunski, LS, Tendys, J and Collins, GA (1993). A Comparison of Plasma Immersion Ion-Implantation with Conventional Ion-Implantation. In: , Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions with Materials and Atoms. 8th International Conf On Ion Beam Modification of Materials, Heidelberg Germany, (262-266). Sep 07-11, 1992.


Author Kenny, MJ
Wielunski, LS
Tendys, J
Collins, GA
Title of paper A Comparison of Plasma Immersion Ion-Implantation with Conventional Ion-Implantation
Conference name 8th International Conf On Ion Beam Modification of Materials
Conference location Heidelberg Germany
Conference dates Sep 07-11, 1992
Proceedings title Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions with Materials and Atoms   Check publisher's open access policy
Journal name Nuclear Instruments   Check publisher's open access policy
Publication Year 1993-06
Sub-type Fully published paper
DOI 10.1016/0168-583X(93)96120-2
ISSN 0168-583X
Volume 80-1
Start page 262
End page 266
Total pages 5
Language eng
Q-Index Code E1
Q-Index Status Provisional Code
Institutional Status Unknown

Document type: Conference Paper
Collection: ResearcherID Downloads
 
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