Plasma Immersion Ion-Implantation - the Role of Diffusion

Collins, GA, Hutchings, R and Tendys, J (1993). Plasma Immersion Ion-Implantation - the Role of Diffusion. In: Surface & Coatings Technology. 3rd International Conf On Plasma Surface Engineering ( Pse 92 ), Garmisch Partenkir Germany, (267-273). Oct 26-29, 1992. doi:10.1016/0257-8972(93)90095-6


Author Collins, GA
Hutchings, R
Tendys, J
Title of paper Plasma Immersion Ion-Implantation - the Role of Diffusion
Conference name 3rd International Conf On Plasma Surface Engineering ( Pse 92 )
Conference location Garmisch Partenkir Germany
Conference dates Oct 26-29, 1992
Proceedings title Surface & Coatings Technology   Check publisher's open access policy
Journal name Surface   Check publisher's open access policy
Publication Year 1993
Sub-type Fully published paper
DOI 10.1016/0257-8972(93)90095-6
ISSN 0257-8972
Volume 59
Issue 1-3
Start page 267
End page 273
Total pages 7
Language eng
Q-Index Code E1
Q-Index Status Provisional Code
Institutional Status Unknown

Document type: Conference Paper
Collection: ResearcherID Downloads
 
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Citation counts: TR Web of Science Citation Count  Cited 32 times in Thomson Reuters Web of Science Article | Citations
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Created: Sun, 11 Sep 2011, 08:30:38 EST by System User