Plasma-immersion ion implantation

Mantese, JV, Brown, IG, Cheung, NW and Collins, GA (1996) Plasma-immersion ion implantation. Mrs Bulletin, 21 8: 52-56.

Author Mantese, JV
Brown, IG
Cheung, NW
Collins, GA
Title Plasma-immersion ion implantation
Journal name Mrs Bulletin   Check publisher's open access policy
ISSN 0883-7694
Publication date 1996-08
Sub-type Article (original research)
Volume 21
Issue 8
Start page 52
End page 56
Total pages 5
Language eng
Keyword Vacuum-Arc
Surface Modification
Q-Index Code C1
Q-Index Status Provisional Code
Institutional Status Unknown

Document type: Journal Article
Sub-type: Article (original research)
Collection: ResearcherID Downloads
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Citation counts: TR Web of Science Citation Count  Cited 84 times in Thomson Reuters Web of Science Article | Citations
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Created: Sun, 11 Sep 2011, 08:29:08 EST by System User