Characterisation of high voltage pulser performance in radiofrequency plasmas

Collins, GA, Short, KT and Tendys, J (1997). Characterisation of high voltage pulser performance in radiofrequency plasmas. In: Surface & Coatings Technology. 3rd International Workshop on Plasma-Based Ion Implantation, Dresden Germany, (181-187). Sep 15-18, 1996. doi:10.1016/S0257-8972(97)00041-8


Author Collins, GA
Short, KT
Tendys, J
Title of paper Characterisation of high voltage pulser performance in radiofrequency plasmas
Conference name 3rd International Workshop on Plasma-Based Ion Implantation
Conference location Dresden Germany
Conference dates Sep 15-18, 1996
Proceedings title Surface & Coatings Technology   Check publisher's open access policy
Journal name Surface   Check publisher's open access policy
Publication Year 1997
Sub-type Fully published paper
DOI 10.1016/S0257-8972(97)00041-8
ISSN 0257-8972
Volume 93
Issue 2-3
Start page 181
End page 187
Total pages 7
Language eng
Keyword plasma immersion
high voltage pulsing
rf plasma
Immersion Ion-Implantation
Technology
Modulator
Q-Index Code E1
Q-Index Status Provisional Code
Institutional Status Unknown

Document type: Conference Paper
Collection: ResearcherID Downloads
 
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Created: Sun, 11 Sep 2011, 08:27:35 EST by System User