A comparative study of different IBA techniques for determining the thickness of thin SiO2 films

Dytlewski, N, Cohen, DD, Evans, PJ, Prince, KE, Collins, GA, Barbe, C and Cassidy, DJ (2000). A comparative study of different IBA techniques for determining the thickness of thin SiO2 films. In: , Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions with Materials and Atoms. 14th International Conference on Ion Beam Analysis/6th European Conference on Accelerators in Applied Research and Technology, Dreseden Germany, (573-577). Jul 26-30, 1999.


Author Dytlewski, N
Cohen, DD
Evans, PJ
Prince, KE
Collins, GA
Barbe, C
Cassidy, DJ
Title of paper A comparative study of different IBA techniques for determining the thickness of thin SiO2 films
Conference Paper Type Fully Published Paper
Conference name 14th International Conference on Ion Beam Analysis/6th European Conference on Accelerators in Applied Research and Technology
DOI 10.1016/S0168-583X(99)00944-1
Conference location Dreseden Germany
Conference dates Jul 26-30, 1999
Proceedings title Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions with Materials and Atoms   Check publisher's open access policy
Journal name Nuclear Instruments   Check publisher's open access policy
Publication date 2000-03
Volume number 161
ISSN 0168-583X
Start page 573
End page 577
Total pages 5
Language eng
Keyword Rbs
Nra
heavy ions
SiO2
sol-gel
thin films
Silicon
Q-Index Code E1
Q-Index Status Provisional Code
Institutional Status Unknown

Document type: Conference Paper
Sub-type: Fully Published Paper
Collection: ResearcherID Downloads
 
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