Mold fabricated by nanoscratching for nanoimprint lithography

Ohsone, Wataru, Shimizu, Jun, Zhou, Li Bo, Ojima, Hirotaka, Onuki, Teppei, Yamamoto, Takeyuki and Huang, Han (2010) Mold fabricated by nanoscratching for nanoimprint lithography. Advanced Materials Research, 126-128 843-848. doi:10.4028/

Author Ohsone, Wataru
Shimizu, Jun
Zhou, Li Bo
Ojima, Hirotaka
Onuki, Teppei
Yamamoto, Takeyuki
Huang, Han
Title Mold fabricated by nanoscratching for nanoimprint lithography
Journal name Advanced Materials Research   Check publisher's open access policy
ISSN 1022-6680
ISBN 978-0-87849-242-8
Publication date 2010-08-12
Year available 2010
Sub-type Article (original research)
DOI 10.4028/
Volume 126-128
Start page 843
End page 848
Total pages 6
Editor Yunn-Shiuan Liao
Chao-Chang A. Chen
Choung-Lii Chao
Pei-Lum Tso
Place of publication Stafa-Zurich, Switzerland
Publisher Trans Tech Publications
Collection year 2011
Language eng
Abstract The MEMS technology for various nano/micro devices often requires special facilities and complicated and multistage processes, thus the fabrication cost is extremely high. This research aimed to fabricate nanoscale basic structures on silicon substrates using nanoscratching, which can be potentially used to make nano/micro molds for nanoimprint lithography. In this study, various nano/micro-scale structures, such as groove and, single and multiple layer structures were generated on the silicon substrate using an atomic force microscope equipped with a sharp probe made of monocrystalline diamond. The nanoimprint experiment was also performed using the fabricated single-step mold and silicon-resin to fabricate single island structures.
Keyword Atomic Force Microscope (AFM)
Diamond Probe
Nanoimprint Lithography
Silicon Wafer
Q-Index Code C1
Q-Index Status Confirmed Code
Institutional Status UQ
Additional Notes Volume title: Advances in Abrasive Technology XIII, Published online August, 2010.

Document type: Journal Article
Sub-type: Article (original research)
Collections: School of Mechanical & Mining Engineering Publications
Official 2011 Collection
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Created: Tue, 23 Nov 2010, 23:15:26 EST by Professor Han Huang on behalf of School of Mechanical and Mining Engineering