{111} and {311} rod-like defects in silicon ion implanted silicon

Chou, C. T., Cockayne, D. J. H., Zou, J., Kringhøj, P. and Jagadish, C (1997). {111} and {311} rod-like defects in silicon ion implanted silicon. In: Proceedings: 1996 Conference On Optoelectronic and Microelectronic Materials and Devices. 1996 Conference on Optoelectronic and Microelectronic Materials and Devices (COMMAD 9), Canberra, Australia, (305-308). 8-11 December 1996. doi:10.1109/COMMAD.1996.610131


Author Chou, C. T.
Cockayne, D. J. H.
Zou, J.
Kringhøj, P.
Jagadish, C
Title of paper {111} and {311} rod-like defects in silicon ion implanted silicon
Conference name 1996 Conference on Optoelectronic and Microelectronic Materials and Devices (COMMAD 9)
Conference location Canberra, Australia
Conference dates 8-11 December 1996
Proceedings title Proceedings: 1996 Conference On Optoelectronic and Microelectronic Materials and Devices
Journal name 1996 Conference On Optoelectronic and Microelectronic Materials and Devices, Proceedings
Publication Year 1997
Sub-type Fully published paper
DOI 10.1109/COMMAD.1996.610131
ISBN 0-7803-3374-8
Start page 305
End page 308
Total pages 4
Language eng
Q-Index Code E1
Q-Index Status Provisional Code
Institutional Status Unknown

Document type: Conference Paper
Collection: School of Mechanical & Mining Engineering Publications
 
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Created: Tue, 23 Nov 2010, 01:33:05 EST by Professor Jin Zou on behalf of School of Mechanical and Mining Engineering