Misfit dislocations generated from inhomogeneous sources and their critical thicknesses in a InGaAs/GaAs heterostructure grown by molecular beam epitaxy

Zou, J., Cockayne, D. J. H. and Russell-Harriott, J. J. (1997) Misfit dislocations generated from inhomogeneous sources and their critical thicknesses in a InGaAs/GaAs heterostructure grown by molecular beam epitaxy. Applied Physics Letters, 70 23: 3134-3136. doi:10.1063/1.119112

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Author Zou, J.
Cockayne, D. J. H.
Russell-Harriott, J. J.
Title Misfit dislocations generated from inhomogeneous sources and their critical thicknesses in a InGaAs/GaAs heterostructure grown by molecular beam epitaxy
Journal name Applied Physics Letters   Check publisher's open access policy
ISSN 0003-6951
1077-3118
Publication date 1997-06
Sub-type Article (original research)
DOI 10.1063/1.119112
Open Access Status File (Publisher version)
Volume 70
Issue 23
Start page 3134
End page 3136
Total pages 3
Place of publication College Park, MD, United States
Publisher American Institute of Physics
Language eng
Abstract Misfit dislocations generated from inhomogeneous sources in InGaAs/GaAs strained-layer heterostructures grown by molecular beam epitaxy were investigated using transmission electron microscopy (TEM) with the lift-off technique. These inhomogeneous sources are suggested to be particulates. TEM investigations show that (1) the critical thicknesses of misfit dislocations generated from inhomogeneous sources are the same as those generated from preexisting threading dislocations, and (2) each inhomogeneous source may generate a number of misfit dislocations. These observations suggest that these inhomogeneous sources are a prime source of misfit dislocation generation.
Q-Index Code C1
Q-Index Status Provisional Code
Institutional Status Non-UQ

Document type: Journal Article
Sub-type: Article (original research)
Collection: School of Mechanical & Mining Engineering Publications
 
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Created: Tue, 23 Nov 2010, 01:27:02 EST by Professor Jin Zou on behalf of School of Mechanical and Mining Engineering