{111} defects in 1-MeV-silicon-ion-implanted silicon

Chou, C. T., Cockayne, D. J. H., Zou, J., Kringhoj, P. and Jagadish, C. (1995) {111} defects in 1-MeV-silicon-ion-implanted silicon. Physical Review B, 52 24: 17223-17230. doi:10.1103/PhysRevB.52.17223

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Author Chou, C. T.
Cockayne, D. J. H.
Zou, J.
Kringhoj, P.
Jagadish, C.
Title {111} defects in 1-MeV-silicon-ion-implanted silicon
Journal name Physical Review B   Check publisher's open access policy
ISSN 1098-0121
Publication date 1995-12-15
Sub-type Article (original research)
DOI 10.1103/PhysRevB.52.17223
Open Access Status File (Publisher version)
Volume 52
Issue 24
Start page 17223
End page 17230
Total pages 8
Place of publication College Park, MD, U.S.A.
Publisher American Physical Society
Language eng
Formatted abstract
Rodlike defects with the {111} habit plane have been identified by electron microscopy, at a well-defined depth below the surface of silicon specimens subjected to a 1 MeV Si ion implantation (1×1014 cm-2 dose, followed by 900 °C annealing for 10 sec), and coexistent with defects on {311} habit planes. Energy minimization calculations using the Stillinger-Weber potential were carried out on a self-interstitial atomic configuration; the final relaxed atomic configuration consists of five- and eight-membered rings. Calculated images based on this atomic model match ‘‘double-spacing’’ experimental high-resolution electron microscopy images. The energy minimization calculation suggests a displacement vector of a怈111怉 /10, perpendicular to the habit plane, for the {111} defect. Diffraction contrast experiments revealed that, in the present specimens, about a tenth of the rodlike defects have this displacement vector. The {111} defects were also observed using a 120-keV electron microscope, below the critical energy of 170 keV for generating Frenkel pairs in Si by electron irradiation. This indicates that the {111} defects can be generated by ion implantation and annealing.
Q-Index Code C1
Q-Index Status Provisional Code

Document type: Journal Article
Sub-type: Article (original research)
Collection: School of Mechanical & Mining Engineering Publications
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Citation counts: TR Web of Science Citation Count  Cited 21 times in Thomson Reuters Web of Science Article | Citations
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Created: Sun, 21 Nov 2010, 23:47:59 EST by Professor Jin Zou on behalf of School of Mechanical and Mining Engineering