Adherent carbon film deposition by cathodic arc with implantation

Gerstner, E. G., McKenzie, D. R., Puchert, M. K., Timbrell, P. Y. and Zou, J. (1995) Adherent carbon film deposition by cathodic arc with implantation. Journal of Vacuum Science & Technology A., 13 2: 406-411. doi:10.1116/1.579372

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Author Gerstner, E. G.
McKenzie, D. R.
Puchert, M. K.
Timbrell, P. Y.
Zou, J.
Title Adherent carbon film deposition by cathodic arc with implantation
Journal name Journal of Vacuum Science & Technology A.   Check publisher's open access policy
ISSN 0734-2101
Publication date 1995
Year available 1995
Sub-type Article (original research)
DOI 10.1116/1.579372
Open Access Status File (Publisher version)
Volume 13
Issue 2
Start page 406
End page 411
Total pages 6
Place of publication Melville, NY, United States
Publisher A I P Publishing LLC
Language eng
Abstract A method of improving the adhesion of carbon thin films deposited using a cathodic vacuum arc by the use of implantation at energies up to 20 keV is described. A detailed analysis of carbon films deposited onto silicon in this way is carried out using complementary techniques of transmission electron microscopy and x-ray photoelectron spectroscopy (XPS) is presented. This analysis shows that an amorphous mixing layer consisting of carbon and silicon is formed between the grown pure carbon film and the crystalline silicon substrate. In the mixing layer, it is shown that some chemical bonding occurs between carbon and silicon. Damage to the underlying crystalline silicon substrate is observed and believed to be caused by interstitial implanted carbon atoms which XPS shows are not bonded to the silicon. The effectiveness of this technique is confirmed by scratch testing and by analysis with scanning electron microscopy which shows failure of the silicon substrate occurs before delamination of the carbon film.
Keyword X-ray
Q-Index Code C1
Q-Index Status Provisional Code
Institutional Status Unknown

Document type: Journal Article
Sub-type: Article (original research)
Collection: School of Mechanical & Mining Engineering Publications
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Created: Sun, 21 Nov 2010, 23:33:53 EST by Professor Jin Zou on behalf of School of Mechanical and Mining Engineering