Microstructural observations of Ta/Al superlattices by TEM

Jiang, SS, Zou, J, Cockayne, Djh, Sikorski, A, Hu, A and Peng, RW (1992) Microstructural observations of Ta/Al superlattices by TEM. Physica Status Solidi. A: Applications and Materials Science, 130 2: 373-381. doi:10.1002/pssa.2211300214

Author Jiang, SS
Zou, J
Cockayne, Djh
Sikorski, A
Hu, A
Peng, RW
Title Microstructural observations of Ta/Al superlattices by TEM
Journal name Physica Status Solidi. A: Applications and Materials Science   Check publisher's open access policy
ISSN 1862-6300
Publication date 1992-04
Sub-type Article (original research)
DOI 10.1002/pssa.2211300214
Volume 130
Issue 2
Start page 373
End page 381
Total pages 9
Place of publication Weinheim, Germany
Publisher Wiley - V C H Verlag GmbH
Language eng
Abstract Ta/Al multilayer films are fabricated by magnetron sputtering. Cross-section transmission electron microscopy (XTEM) shows the well-formed layer structures of Ta/Al superlattices. The modulation wavelength of the superlattice can be determined from the spacing of high order satellites in the low angle regions of both electron and X-ray diffraction patterns. The cross-section dark field images and the plan-view diffraction patterns show that the in-plane structures of Ta and Al are polycrystalline and that the grain sizes of crystals are small. The majority of crystals have Ta [110] and Al [111] textures in the growth direction of multilayer films. The microstructures of interfaces between Ta (110) and Al (111) are briefly studied by high resolution electron microscopy (HREM). Copyright © 1999–2011 John Wiley & Sons, Inc. All Rights Reserved.
Q-Index Code C1
Q-Index Status Provisional Code
Institutional Status Unknown

Document type: Journal Article
Sub-type: Article (original research)
Collection: School of Mechanical & Mining Engineering Publications
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Created: Sun, 21 Nov 2010, 22:04:31 EST by Professor Jin Zou on behalf of School of Mechanical and Mining Engineering