Nanoscratch-induced deformation of single crystal silicon

Wu, Y.Q., Huang, H., Zou, J. and Dell, J.M. (2009) Nanoscratch-induced deformation of single crystal silicon. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 27 3: 1374-1377. doi:10.1116/1.3049517

Author Wu, Y.Q.
Huang, H.
Zou, J.
Dell, J.M.
Title Nanoscratch-induced deformation of single crystal silicon
Journal name JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B   Check publisher's open access policy
ISSN 1071-1023
Publication date 2009-05
Year available 2009
Sub-type Article (original research)
DOI 10.1116/1.3049517
Volume 27
Issue 3
Start page 1374
End page 1377
Total pages 4
Editor McGuire, G.E.
Place of publication United States
Publisher American Institute of Physics
Collection year 2010
Language eng
Subject C1
100707 Nanomanufacturing
869999 Manufacturing not elsewhere classified
Abstract The nanoscratching-induced deformation of monocrystalline Si has been investigated using transmission electron microscopy (TEM). The results indicate that amorphization and formation of crystalline defects are two dominant phenomena associated with the scratching processes. TEM analyses reveal that amorphization occurs at extremely small scratching loads. Stacking faults and twins are nucleated at a smaller load than that for dislocation. Dislocations start to nucleate along Si {111} planes when the normal scratching load is greater than a threshold value and penetrate deeper into the Si subsurface with the increasing load. Both normal load and tip radius have significant influence on the deformation, which are somehow different from those associated with nanoindentation and nanogrinding.
Keyword amorphisation
dislocation nucleation
Elemental semiconductors
stacking faults
Q-Index Code C1
Q-Index Status Confirmed Code

Document type: Journal Article
Sub-type: Article (original research)
Collections: 2010 Higher Education Research Data Collection
School of Mechanical & Mining Engineering Publications
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Citation counts: TR Web of Science Citation Count  Cited 19 times in Thomson Reuters Web of Science Article | Citations
Scopus Citation Count Cited 23 times in Scopus Article | Citations
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Created: Wed, 10 Mar 2010, 09:27:51 EST by Sally Beard on behalf of School of Mechanical and Mining Engineering