Cryogenic two-photon laser photolithography with SU-8

Lee, Kwan H., Green, Alex M., Taylor, Robert A., Sharp, David N., Turberfield, Andrew J., Brossard, Frederic S. F., Williams, David A. and Briggs, G. Andrew D. (2006) Cryogenic two-photon laser photolithography with SU-8. Applied Physics Letters, 88 14: 143123-143123-3. doi:10.1063/1.2194311

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Author Lee, Kwan H.
Green, Alex M.
Taylor, Robert A.
Sharp, David N.
Turberfield, Andrew J.
Brossard, Frederic S. F.
Williams, David A.
Briggs, G. Andrew D.
Title Cryogenic two-photon laser photolithography with SU-8
Journal name Applied Physics Letters   Check publisher's open access policy
ISSN 0003-6951
1077-3118
Publication date 2006-04-03
Sub-type Article (original research)
DOI 10.1063/1.2194311
Open Access Status File (Publisher version)
Volume 88
Issue 14
Start page 143123
End page 143123-3
Total pages 3
Editor Nghi Q. Lam
Place of publication Melville, N.Y., U. S. A.
Publisher American Institute of Physics
Language eng
Subject 02 Physical Sciences
0915 Interdisciplinary Engineering
Formatted abstract
We have shown that photolithography can be used to create alignment markers on a semiconductor substrate at cryogenic temperatures. The epoxy resist SU-8 can be exposed effectively by two-photon absorption at a temperature of 4 K. By this means a spectroscopy apparatus can be used to find the positions of randomly distributed structures at low temperatures, such as InGaAs/GaAs quantum dots, and mark their positions. We present a systematic study of the optical exposure parameters for cryogenic two-photon laser photolithography with SU-8.
© 2006 American Institute of Physics
Keyword Indium compounds
GaAs
Gallium arsenide
III-V semiconductors
Semiconductor quantum dots
Photoresists
Cryogenic electronics
Two-photon processes
InGaAs
Indium gallium arsenide
Q-Index Code C1
Q-Index Status Provisional Code
Institutional Status Unknown

Document type: Journal Article
Sub-type: Article (original research)
Collections: Excellence in Research Australia (ERA) - Collection
School of Mathematics and Physics
 
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