Electron beam nanoprocessing of a carbon nanotube film using a variable pressure scanning electron microscope

Niitsuma, J., Sekiguchi, T., Yuan, X.-L. and Awano, Y. (2007) Electron beam nanoprocessing of a carbon nanotube film using a variable pressure scanning electron microscope. Journal of Nanoscience And Nanotechnology, 7 7: 2356-2360.


Author Niitsuma, J.
Sekiguchi, T.
Yuan, X.-L.
Awano, Y.
Title Electron beam nanoprocessing of a carbon nanotube film using a variable pressure scanning electron microscope
Journal name Journal of Nanoscience And Nanotechnology   Check publisher's open access policy
ISSN 1533-4880
Publication date 2007-07
Sub-type Article (original research)
DOI 10.1166/jnn.2007.420
Volume 7
Issue 7
Start page 2356
End page 2360
Total pages 5
Place of publication Stevenson Ranch, CA, U.S.A.
Publisher American Scientific Publishers
Language eng
Subject 1007 Nanotechnology
Formatted abstract We demonstrate a novel method of processing carbon nanotubes using a variable pressure scanning electron microscope. Lines were processed in a nanotube film by electron beam irradiation in oxygen gas and nitrogen gas. The processing mechanism can be explained in terms of gas ion sputtering and chemical reaction. In this experiment, the narrowest line width of 120 nm was achieved in a nitrogen atmosphere.
Copyright © 2007 American Scientific Publishers All rights reserved.
Keyword Carbon nanotube
Electron beam
Environmental SEM
Nanoprocessing
Variable-pressure SEM
Q-Index Code C1

Document type: Journal Article
Sub-type: Article (original research)
Collections: Julius Kruttschnitt Mineral Research Centre Publications
Excellence in Research Australia (ERA) - Collection
 
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