Aluminum induced in situ crystallization of amorphous SiC

Wang, Li, Dimitrijev, Sima, Tanner, Philip and Zou, Jin (2009) Aluminum induced in situ crystallization of amorphous SiC. Applied Physics Letters, 94 18: 181909.1-181909.3. doi:10.1063/1.3132053


Author Wang, Li
Dimitrijev, Sima
Tanner, Philip
Zou, Jin
Title Aluminum induced in situ crystallization of amorphous SiC
Formatted title Aluminum induced in situ crystallization of amorphous SiC
Journal name Applied Physics Letters   Check publisher's open access policy
ISSN 0003-6951
1077-3118
Publication date 2009-05-04
Year available 2009
Sub-type Article (original research)
DOI 10.1063/1.3132053
Volume 94
Issue 18
Start page 181909.1
End page 181909.3
Total pages 3
Place of publication College Park, MD, United States
Publisher American Institute of Physics
Collection year 2010
Language eng
Subject C1
970102 Expanding Knowledge in the Physical Sciences
970109 Expanding Knowledge in Engineering
970110 Expanding Knowledge in Technology
091203 Compound Semiconductors
100708 Nanomaterials
100712 Nanoscale Characterisation
Formatted abstract Experimental evidence of aluminum induced in situ crystallization of amorphous SiC is presented. The deposition of SiC films on Si substrates was performed using low pressure chemical vapor deposition method at 600 °C with concurrent supply of Al(CH3)3 and H3SiCH3. Transmission electron micrographs confirm the presence of nanocrystals, whereas capacitance-voltage measurements demonstrate that the deposited films are p type doped. A crystallization mechanism is proposed based on the classic theory of nucleation in the growth rate limited regime. The introduction of Al(CH3)3 enhances the surface reaction and increases the supersaturation, which reduces the activation energy for nucleation.
Keyword Aluminium
Amorphous semiconductors
Chemical vapour deposition
Crystallisation
Q-Index Code C1
Q-Index Status Confirmed Code
Institutional Status UQ

Document type: Journal Article
Sub-type: Article (original research)
Collections: 2010 Higher Education Research Data Collection
ERA 2012 Admin Only
Centre for Microscopy and Microanalysis Publications
 
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Created: Fri, 04 Sep 2009, 10:28:49 EST