Tri-buffer process: A new approach to obtain high-quality ZnO epitaxial films on sapphire substrates

Mei, Z. X., Du, X. L., Wang, Y., Ying, M. J., Zeng, Z. Q., Yuan, H. T., Jia, J. F., Xue, Q. K. and Zhang, Z. (2007) Tri-buffer process: A new approach to obtain high-quality ZnO epitaxial films on sapphire substrates. Journal of Electronic Materials, 36 4: 452-456. doi:10.1007/s11664-006-0053-9


Author Mei, Z. X.
Du, X. L.
Wang, Y.
Ying, M. J.
Zeng, Z. Q.
Yuan, H. T.
Jia, J. F.
Xue, Q. K.
Zhang, Z.
Title Tri-buffer process: A new approach to obtain high-quality ZnO epitaxial films on sapphire substrates
Journal name Journal of Electronic Materials   Check publisher's open access policy
ISSN 0361-5235
1543-186X
Publication date 2007-04
Sub-type Article (original research)
DOI 10.1007/s11664-006-0053-9
Volume 36
Issue 4
Start page 452
End page 456
Total pages 5
Place of publication New York, NY, United States
Publisher Springer
Language eng
Subject 0204 Condensed Matter Physics
0912 Materials Engineering
Abstract A tri-buffer method was applied to achieve layer-by-layer growth of high-quality ZnO films on sapphire (0001) substrates by rf plasma-assisted molecular beam epitaxy (MBE). After sufficient nitridation of the substrate, MgO and ZnO buffer layers were subsequently deposited on the resulting AlN layer. An atomically smooth ZnO surface with a roughness less than 1 nm in a 10 μm × 10 μm scanned area was obtained with this method. The crystal quality was also improved, as characterized by reflection high-energy electron diffraction (RHEED), x-ray diffraction (XRD), Raman spectroscopy, and transmission electron microscopy (TEM). The results indicate that the tri-buffer process could reduce the large lattice mismatch between ZnO and nitrided sapphire and facilitate the two-dimensional (2-D) growth of the ZnO epilayer. A model is proposed to understand the observations.
Keyword ZnO
MgO
Sapphire
Tri-buffer
Molecular beam epitaxy (MBE)
Q-Index Code C1
Q-Index Status Provisional Code
Institutional Status Non-UQ

Document type: Journal Article
Sub-type: Article (original research)
Collections: Excellence in Research Australia (ERA) - Collection
School of Mechanical & Mining Engineering Publications
 
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