Structural materials for NEMS/MEMS devices

Huang, H., Wu, Q., Winchester, K. J., Suvorova, A., Dell, J. M., Zou, J. and Faraone, L. (2006). Structural materials for NEMS/MEMS devices. In: C. Jagadish and G. Q. Lu, International Conference on Nanoscience and Nanotechnology, 2006. ICONN '06.. 2006 International Conference on Nonoscience and Nanotechnology (ICONN '06), Brisbane, Australia, (713-716). 3-7 July 2006. doi:10.1109/ICONN.2006.340717


Author Huang, H.
Wu, Q.
Winchester, K. J.
Suvorova, A.
Dell, J. M.
Zou, J.
Faraone, L.
Title of paper Structural materials for NEMS/MEMS devices
Conference name 2006 International Conference on Nonoscience and Nanotechnology (ICONN '06)
Conference location Brisbane, Australia
Conference dates 3-7 July 2006
Proceedings title International Conference on Nanoscience and Nanotechnology, 2006. ICONN '06.
Journal name 2006 International Conference On Nanoscience and Nanotechnology, Vols 1 and 2
Place of Publication Piscataway, NJ, United States
Publisher IEEE
Publication Year 2006
Sub-type Fully published paper
DOI 10.1109/ICONN.2006.340717
ISBN 9781424404520
1424404525
1424404533
Editor C. Jagadish
G. Q. Lu
Start page 713
End page 716
Total pages 4
Collection year 2006
Language eng
Subjects E1
291804 Nanotechnology
671499 Instrumentation not elsewhere classified
Q-Index Code E1
Q-Index Status Provisional Code
Institutional Status UQ
Additional Notes Article number 4143497

 
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Created: Fri, 24 Aug 2007, 07:59:39 EST