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Dytlewski, N, Cohen, DD, Evans, PJ, Prince, KE, Collins, GA, Barbe, C and Cassidy, DJ (2000). A comparative study of different IBA techniques for determining the thickness of thin SiO2 films. In: Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions with Materials and Atoms. 14th International Conference on Ion Beam Analysis/6th European Conference on Accelerators in Applied Research and Technology, Dreseden Germany, (573-577). Jul 26-30, 1999. doi:10.1016/S0168-583X(99)00944-1 20   0 0