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Kenny, MJ, Wielunski, LS, Tendys, J and Collins, GA (1993). A Comparison of Plasma Immersion Ion-Implantation with Conventional Ion-Implantation. In: Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions with Materials and Atoms. 8th International Conf On Ion Beam Modification of Materials, Heidelberg Germany, (262-266). Sep 07-11, 1992. doi:10.1016/0168-583X(93)96120-2 41   11 0